椭圆光度法 pdf epub mobi txt 电子书下载 2024

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Fujiwara, Hiroyuki

John Wiley & Sons Inc

2007-1

369

1717.60元

HRD

9780470016084

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发表于2024-11-24

椭圆光度法 epub 下载 mobi 下载 pdf 下载 txt 电子书下载 2024

椭圆光度法 pdf epub mobi txt 电子书下载 2024

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Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.

椭圆光度法下载 mobi epub pdf txt 电子书