VLSI Fabrication Principles pdf epub mobi txt 電子書 下載2025
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- IC
- VLSI
- 集成電路製造
- 半導體工藝
- 微電子學
- 工藝流程
- 器件物理
- 薄膜技術
- 光刻技術
- 擴散技術
- 刻蝕技術
具體描述
Fully updated with the latest technologies, this edition covers the fundamental principles underlying fabrication processes for semiconductor devices along with integrated circuits made from silicon and gallium arsenide. Stresses fabrication criteria for such circuits as CMOS, bipolar, MOS, FET, etc. These diverse technologies are introduced separately and then consolidated into complete circuits.
An Instructor's Manual presenting detailed solutions to all the problems in the book is available from the Wiley editorial department.
著者簡介
Sorab K. Ghandhi is a professor Emeritus at Rensselaer Polytechnic Institute known for his pioneering work in electrical engineering and microelectronics education, and in the research and development of Organometallic Vapor Phase Epitaxy for compound semiconductors.
圖書目錄
02. Phase Diagrams and Solid Solubility------------69~101
03. Crystal Growth and Doping------------------------102~149
04. Diffusion------------------------------------------------150~257
05. Epitaxy--------------------------------------------------258~367
06. Ion Implantation---------------------------------------368~450
07. Native Films--------------------------------------------451~509
08. Deposited Films---------------------------------------510~586
09. Etching and Cleaning--------------------------------587~661
10. Lithographic Processes-----------------------------662~703
11. Device and Circuit Fabrication--------------------704~800
12. Appendix: The Mathematics of Diffusion
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圖錶詳盡文筆讀起來太費勁
评分《超大規模集成電路工藝原理》，電子工業齣版社，1986年譯本，二譯江綿恒
评分《超大規模集成電路工藝原理》，電子工業齣版社，1986年譯本，二譯江綿恒
评分圖錶詳盡文筆讀起來太費勁
评分《超大規模集成電路工藝原理》，電子工業齣版社，1986年譯本，二譯江綿恒
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