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Micro Machines
Micro Machines
Micromachined Thin-film Sensors for SOI-CMOS Co-integration
Micromachined Devices and Components V
Micromachining Using Electrochemical Discharge Phenomenon
Micromachining of Engineering Materials
Micromachining & Microfabrication Process Technology III
Micromachining Technology For Micro-Optics and Nano-Optics III
Micromachining and Microfabrication Process Technology X
Micromaching and Microfabrication Processing Technology, VI
Micromachining and Microfabrication Process Technology XI
Micromachining Technology for Micro-optics and Nano-optics IV
Nano and Micromachining
Handbook of Micromachining and Microfabrication
Materials and Device Characterization in Micromachining II
Handbook of Microlithography, Micromachining and Microfabrication
Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1
