Micromechanical devices are of great interest for a wide variety of applications, such as inertial sensing, biological/chemical sensing, projection display, biomedical imaging, and wireless communications. Design of Micromechanical Devices provides a comprehensive and in-depth description of the design and modeling of micromechanical devices from mechanical structural components, integrated transducers, to electromechanical system-level models upon which their interface circuits can be designed.
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