Fabrication Engineering at the Micro and Nanoscale (The Oxford Series in Electrical and Computer Eng pdf epub mobi txt 電子書 下載 2024


Fabrication Engineering at the Micro and Nanoscale (The Oxford Series in Electrical and Computer Eng

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Stephen A. Campbell
Oxford University Press, USA
2007-09-17
672
USD 89.95
Paperback
9780195320176

圖書標籤: TextBook  IC  EECS   


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发表于2024-09-20

Fabrication Engineering at the Micro and Nanoscale (The Oxford Series in Electrical and Computer Eng epub 下載 mobi 下載 pdf 下載 txt 電子書 下載 2024

Fabrication Engineering at the Micro and Nanoscale (The Oxford Series in Electrical and Computer Eng epub 下載 mobi 下載 pdf 下載 txt 電子書 下載 2024

Fabrication Engineering at the Micro and Nanoscale (The Oxford Series in Electrical and Computer Eng pdf epub mobi txt 電子書 下載 2024



圖書描述

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, the third edition of Fabrication Engineering at the Micro and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication. Completely revised and updated, the text covers the entire basic unit processes used to fabricate integrated circuits and other devices. It includes more worked examples, illustrations, and expands coverage of the frontiers of fabrication processes. The physics and chemistry of each process are introduced along with descriptions of the equipment used to carry out the processes. The text uses a popular commercial process simulation suite-the Silvaco Athena(R) set of codes-to provide meaningful examples of many of the basic processes including diffusion, oxidation, lithography, and deposition. The book goes on to discuss the integration of these basic unit processes into various technologies, concentrating on CMOS transistors. The text breaks down the material into treatments on the concepts of process modules, thermal budget, advanced architectures, and the use of channel strain for improved performance.

Fabrication Engineering at the Micro and Nanoscale (The Oxford Series in Electrical and Computer Eng 下載 mobi epub pdf txt 電子書

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Fabrication Engineering at the Micro and Nanoscale (The Oxford Series in Electrical and Computer Eng pdf epub mobi txt 電子書 下載
想要找書就要到 小哈圖書下載中心
立刻按 ctrl+D收藏本頁
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教材之一。同時在類似課的係主任麵前pre前選取瞭段落完成PECVD的細節補充,概念原理就不用說瞭,感覺就連實驗細節都快背下來瞭…

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