Plasma-Aided Nanofabrication pdf epub mobi txt 電子書 下載2025
- Plasma Nanofabrication
- Nanotechnology
- Plasma Processing
- Materials Science
- Surface Engineering
- Thin Films
- Nanomaterials
- Semiconductor Fabrication
- Etching
- Deposition
具體描述
In this single work to cover the use of plasma as nanofabrication tool in sufficient depth internationally renowned authors with much experience in this important method of nanofabrication look at reactive plasma as a nanofabrication tool, plasma production and development of plasma sources, as well as such applications as carbon-based nanostructures, low-dimensional quantum confinement structures and hydroxyapatite bioceramics. Written principally for solid state physicists and chemists, materials scientists, and plasma physicists, the book concludes with the outlook for such applications.
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